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McCandless, J. P.; Protasenko, V.; Morell, B. W.; Steinbrunner, E.; Neal, A. T.; Tanen, N.; Cho, Y.; Asel, T. J.; Mou, S.; Vogt, P.; et al (, Applied Physics Letters)We report controlled silicon doping of Ga2O3 grown in plasma-assisted molecular beam epitaxy. Adding an endplate to the Si effusion cell enables the control of the mobile carrier density, leading to over 5-orders of magnitude change in the electrical resistivity. Room temperature mobilities >100 cm2/V s are achieved, with a peak value >125 cm2/V s at a doping density of low-1017/cm3. Temperature-dependent Hall effect measurements exhibit carrier freeze out for samples doped below the Mott criterion. A mobility of 390 cm2/V s is observed at 97 K.more » « less
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